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MEMS-222111327M85049/109S08KZ25-14MSC8W38T15-L6M207526BPN156.2500MHZMS27467E23A55SBMCV 1 5/ 2-GF-3 5 P26 THRRMTSW-216-12-S-D-200-LAMLSG342M040JA0CMK 21 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